C07200 - SEMI C72 - Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA StdTpc-Ultrapure Water This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25

the sum of the peak height Zp and the valley depth Zv are reported

Each grade of liquid chemicals (1–5) that have been validated analytically using the appropriate procedures described in this Guide can be described as ‘meeting SEMI Specifications

org in March 2003

SEMI C20-0213 (Reapproved 1218)

C07200 - SEMI C72 - Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA StdTpc-Ultrapure Water This edition was approved forThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published August 2011. The purpose of this Document is to provide a guide for propylene glycol mono methyl ether (PGME), propylene glycol mono methyl ether acetate (PGMEA) and