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The procedure for generating the set of ConRefs is based on interlaboratory testing in accordance with ASTM E691
such as XML schema
It is not intended to specify a complete set of equipment types
(Table R1-2)
SEMI E112-1104 (technical revision)
HB00400 - SEMI HB4 - Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI) StdPbc-0714 The procedure for generating theThe purpose of this Standard is to define the equipment automation interface for communication and control of process, automation and metrology equipment used in high brightness light emitting diode (HB LED) manufacturing. It intends to produce economic benefits for both manufacturers and equipment suppliers by identifying a subset of relevant functionalities out of the existing SEMI Communications Standards for the application in HB LED manufacturing
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